SIMOX
Ouvrage 9780863413346 : SIMOX
Separation-by-Implanted-Oxygen (SIMOX) technology is a method of
fabrication of silicon on-insulator structures and substrates by
implanting high doses of oxygen and high temperature annealing. SIMOX
consists of a sequence of chapters, each of which is written by a
pioneer or key contributor to the technical area. The content includes
an historical perspective of SIMOX developments, fundamental formation
mechanisms, emerging techniques, along with SOI material
characterisation methods and results, technological processes from R&D
to advanced applications, and a brief overview of VLSI circuit
applications.
SIMOX represents the first effort to compile a broad spectrum of
knowledge from various groups of researchers and technologists in the
world. It provides the reader with a basic understanding of SIMOX
technology and in addition gives a good starting point for further
investigation and applications.
Auteur : ANC
Editeur : PETER PEREGRINUS
Nombre de pages : 200
Date de publication : 07 2004
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